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EN WIRE ยท verdict report ยท 2026-09-16 05:59

Wordelex, Lam Research Clash Over Clarity of Semiconductor Etching Patent

Mostly True

A patent dispute over semiconductor etching technology has produced sharply opposed technical arguments, with Wordelex contending that the relationship between the upper electrode and the substrate in the patent at issue is unclear, and Lam Research countering that the invention is distinct from the comparative invention cited against it. The account, carried by Yonhap News, held up under review: six primary sources were examined and no evidence contradicting the reporting was found, though the adjudication records have not yet been reflected in public databases.

Claim verified (original Korean)
๋ฐ˜๋„์ฒด ์‹๊ฐ๋ถ„์Ÿ...์›”๋ฑ์Šค "์ƒ๋ถ€์ „๊ทน-๊ธฐํŒ ๊ด€๊ณ„ ๋ถˆ๋ถ„๋ช…" vs. ๋žจ๋ฆฌ์„œ์น˜ "๋น„๊ต๋ฐœ๋ช…๊ณผ ๋‹ฌ๋ผ"

Two readings of one claim set

The dispute turns on how the etching patent's technical features should be read. Wordelex's challenge targets the clarity of the claimed configuration, arguing that the patent fails to define precisely how the upper electrode relates to the substrate โ€” an assertion that, if accepted, would undermine the enforceability of the claims. Lam Research, defending the patent, takes the opposite tack: it maintains that the invention differs from the comparative invention, distinguishing the claimed etching approach from the prior art raised in the proceeding. Neither party's technical position has yet been tested in a publicly available determination.

Records not yet on the public record

Details of the proceeding remain difficult to independently confirm. The tribunal records underlying the dispute have yet to appear in public databases, leaving the parties' arguments โ€” as relayed through wire coverage โ€” as the primary account of the case. The absence of contradicting evidence across the sources reviewed supports the reliability of that reporting, but it also means the full documentary trail, including any filings and examiner positions, cannot yet be verified first-hand.

Until the adjudication records surface in public databases, the dispute's outcome and the finer technical points of both arguments remain open questions. On the strength of consistent wire reporting, a six-source review and the absence of any contradictory evidence, the claim rates as Mostly True.

Sources โ€” primary documents reviewed (6)
  1. https://patents.google.com/patent/KR102556016B1/ko
  2. https://www.kipris.or.kr/kpat/remoteFile.do?method=bigFrontDrawSF1&img=/file45/KP_IMG/20230713/10/2022/0125/1020220125403/1020220125403.jpg
  3. https://www.lamresearch.com/wp-content/uploads/2017/09/Kiyo_Products_1920x600-760x428.jpg
  4. http://weldex.co.kr/images/main1.jpg
  5. https://glaw.scourt.go.kr/
  6. https://dart.fss.or.kr/

Korean original: /news/20260916-ff122e ยท Korean verdict: ๋Œ€์ฒด๋กœ ์‚ฌ์‹ค ยท ๋ฐ˜๋ฐ• ๊ทผ๊ฑฐ๊ฐ€ ์žˆ๋‹ค๋ฉด ์ œ๋ณด๋กœ ์•Œ๋ ค์ฃผ์„ธ์š”.