EUV Materials Production in Ochang

The new plant, located in the Ochang industrial complex in North Chungcheong Province, is intended for the manufacture of MOR, a photoresist material used in EUV lithography processes for advanced semiconductor fabrication.

JSR Micro Korea is the Korean arm of Japan's JSR Corporation, a major supplier of semiconductor photoresist materials. EUV lithography is used in the most advanced chipmaking processes, and resist materials designed for EUV are a critical link in that supply chain.

Local Government Announcement

The completion was disclosed through a photo release published by the Chungcheongbuk-do provincial government, which identified the facility as the first EUV-oriented MOR production plant of its kind worldwide. Details such as investment scale, production capacity, and timelines for mass production were not included in the release reviewed.

The "world's first" designation originates from the source material and should be understood as the characterization given in that announcement; independent production comparisons across competing materials makers were not part of the released information.

Why It Matters

Korea's semiconductor manufacturing base — anchored by Samsung Electronics and SK hynix — depends heavily on imported high-end process materials, and domestic production of EUV-compatible resins and resists has been a longstanding policy goal. A local facility for EUV MOR materials in Ochang, home to a cluster of chip-related plants, would shorten supply lines for Korean chipmakers adopting EUV technology. Specific customer relationships were not disclosed in the available information.

JSR Micro Korea has completed the world's first factory dedicated to EUV metal oxide resist production in Ochang, North Chungcheong Province — a claim judged Mostly True based on the provincial government's announcement.